Generating width spacing patterns for multiple patterning processes using instances
US10733351B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2018 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Jan 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2111/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Embodiments according to the present disclosure relate to physically implementing an integrated circuit design while conforming to the requirements of complex color based track systems, and using information about instances that have been included in the design. In particular, the present embodiments allow for the automatic creation of WSPs by examining heights and placement orientations of instances, along with the width, spacing, and colors of instance pins and blockages. In these and other embodiments, techniques are provided for filling gaps between generated tracks, as well as for generating tracks to account for the possibility of flipped or mirrored instances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.