Method of preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics

US10734193B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Michael Krause · Ulm, DE
• Georg Schusser · Wettin, DE
• Thomas Höche · Bodenwerder, DE
• Richard C. Busch, II · Phoenix, US

Key dates

• Filing date: Oct 6, 2016
• Grant date: Aug 4, 2020
• Expiry date: Jul 5, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31749
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of preparing a sample for microstructure diagnostics on a sample body by material-ablating processing, and subsequently producing an examination region on the sample portion, the examination region including a target region to be examined, the method including producing a terracing zone including the target region on at least one surface of the sample portion, wherein at least one notch with flanks extending obliquely in relation to the surface is produced next to the target region by material-ablating beam processing to produce the terracing zone, and ablating material from the surface of the sample portion in the region of the terracing zone by an ion beam, which is radiated under grazing incidence onto the surface obliquely to the direction of extent of the notch such that the target region lies behind the notch in the incoming radiation direction of the ion beam and, as a result of the terracing in the region behind the notch, the surface is recessed substantially parallel to the original height of the surface by way of ion beam processing.