Patent · US Active

Automatic spin coating system

US10737288B2 · kind B2 · utility

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5Claims
0Family size

Inventor

Key dates

Filing dateFeb 22, 2018
Grant dateAug 11, 2020
Priority date
Expiry dateJul 16, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N33/80
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An automatic spin coating system includes a dispensing assembly and a base assembly. The dispensing assembly comprises a dispensing device that contains a coating material, a pulley assembly, a drive gear, and a smooth wheel. The base assembly includes a coating plate for receiving the coating material, a chuck plate for securing the coating plate, a stepper pin capable of engaging the drive gear of the dispensing assembly, and an electric motor for spinning the chuck plate. The dispensing device further comprises a vessel assembly to provide immobilization of the dispensing device, and a tubing assembly to control the flow of the coating material. The dispensing device is connected to the pulley assembly, which in turn is connected to the drive gear and the smooth wheel. When the chuck plate spins, the stepper pin revolves and touches the drive gear so as to rotate the pulley assembly, and meanwhile, the coating material is dispensed and coated on the coating plate in different circles without overlap between circles. In one embodiment, the stepper pin has a gear with different sizes of teeth that allow different degrees of movements of the dispensing device. The coating material …

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.