Patent · US Active

Hard thin films

US10738375B2 · kind B2 · utility

0Cited by

9References

20Claims

0Family size

Assignee

HPVICO AB · IT

Inventors

Sharafat Ali · Dhahran, SA
Bo Jonson · Växjö, SE
Jens Birch · Linköping, SE
Per Eklund · Lidingö, SE

Key dates

Filing date	Nov 15, 2016
Grant date	Aug 11, 2020
Priority date	—
Expiry date	Feb 12, 2037

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/505
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Systems and methods provide for the improvement of surface properties via deposition of a film. A typical film may comprise at least three, including at least four components, and typically includes at least one of, including both of, Nitrogen and Oxygen. A film may include at least one of Silicon, Phosphorous, and Boron, and one or more modifiers. For some films, a modifier may include an element having a cationic field strength greater than 10 Å{circumflex over ( )}−2. A film may have a high hardness and/or modulus. A film, may be substantially transparent to visible light. Some films have high refractive indices. Some films have low refractive indices. Some films have very low ultraviolet extinction coefficients.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.