Method and apparatus for verification of TDLAS system operation
US10738997B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2017 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Jul 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensing of gas species characteristics within a process chamber includes selectively projecting a beam of a first select lasing frequency therethough. The beam is optically coupled to a detector to detect a process transmission spectrum having an absorption dip at a select lasing frequency caused by a gas species characteristic. The beam is selectively projected through a fiber Bragg grating which is formed in an optical fiber core to partially reflect at least a portion of the beam of the first select lasing frequency while passing a remainder of the beam. The remainder of the beam has an FBG transmission spectrum mimicking the absorption dip at or near the select lasing frequency caused by a gas species characteristic of interest. It is optically coupled the detector. Outputs of the detector are monitored to compare the FBG transmission spectrum to any process transmission spectrum produced in the process chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.