Minimizing filed size to reduce unwanted stray light
US10739276B2 · kind B2 · utility
2Cited by
15References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2017 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Mar 30, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/064
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.