Patent · US Active

Micromechanical spring for a sensor element

US10739373B2 · kind B2 · utility

1Cited by
0References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 18, 2017
Grant dateAug 11, 2020
Priority date
Expiry dateSep 12, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P2015/0851
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micromechanical spring for a sensor element, including at least two spring sections formed along a sensing axis, the at least two spring sections each having a defined length, and the at least two spring sections having different defined widths.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.