Acceleration sensor
US10739376B2 · kind B2 · utility
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13Claims
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Assignee
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Key dates
| Filing date | Sep 15, 2015 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Feb 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.