Method and apparatus for measuring electrostatic charge of a substrate
US10739394B2 · kind B2 · utility
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11References
19Claims
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Key dates
| Filing date | Nov 30, 2016 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Feb 18, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein are apparatuses and methods for measuring electrostatic charge on a surface of a substrate. The apparatuses comprise a substrate mounting platform, a substrate contacting component, and at least one voltage sensor, wherein the apparatus is programmed to independently control the rotational and translation velocity of a roller and/or to measure a voltage of the substrate at multiple points to produce a two-dimensional map of voltage for at least a portion of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.