Coating apparatus for reducing waste of coating liquid, method for recycling coating liquid by utilization of the same, and method for cleaning the same
US10741427B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 29, 2017 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Apr 12, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/16
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A coating apparatus, a method of recycling a coating liquid by utilization of the same and a method for cleaning the same are provided. The coating apparatus includes a supply device, a coater device and a recycling device. The supply device includes a liquid inlet, a liquid outlet and a coating liquid supply unit connected with the liquid inlet. The coater device includes a coating liquid nozzle including a receiving opening connected with the liquid outlet of the supply device, a coating opening and an exhaust opening. The recycling device includes a recycled liquid outlet and at least one recycling inlet including a supply process recycling inlet which is connected with the exhaust opening of the coating liquid nozzle, and the recycled liquid outlet is connected with the liquid inlet of the supply device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.