Full-field interferential imaging systems and methods
US10743767B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2017 |
| Grant date | Aug 18, 2020 |
| Priority date | — |
| Expiry date | Jul 25, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4709
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for the full-field interferential imaging of a sample, includes an illumination path with a light source, an interferometer with at least one first objective, and a separating element for receiving incident light waves via an input face and for forming an object arm for receiving the sample and a reference arm on which a reflection device is arranged, the reflection device being used to reflect incident light waves in a direction different from the direction of incidence. The separator element has a reflection coefficient and a transmission coefficient that are non-equal such that the proportion of the optical power of the incident light waves sent to the object arm is strictly larger than the proportion of the optical power of the light waves sent to the reference arm. The system also comprises a detection path comprising a two-dimensional image acquisition device, the illumination path and the detection path comprising a common path comprising\input face of the separator element and being separated by a reflection element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.