Patent · US Active

Device for interferometric distance measurement

US10746532B2 · kind B2 · utility

1Cited by

4References

19Claims

0Family size

Assignee

DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

Markus Meissner · Teupitz, DE
Wolfgang Holzapfel · Obing, DE

Key dates

Filing date	Jul 27, 2018
Grant date	Aug 18, 2020
Priority date	—
Expiry date	Oct 26, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/1608
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An interferometric distance measurement device includes a multiple wavelength light source, supplying a light beam having at least three different wavelengths. An interferometer unit is provided, which splits the light beam into a measuring light beam and a reference light beam. The measuring and reference light beams reflected back by measuring and reference reflectors are superimposed in an interfering manner to form an interference light beam. The interference light beam is split via a detection unit such that, in each instance, a plurality of phase-shifted, partial interference signals result per wavelength. With the aid of a signal processing unit, an absolute position information item regarding the measuring reflector is determined from the partial interference signals of different wavelengths.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.