Methods of fabricating semiconductor device
US10748908B2 · kind B2 · utility
5Cited by
6References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2019 |
| Grant date | Aug 18, 2020 |
| Priority date | — |
| Expiry date | May 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/485
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of fabricating a semiconductor device includes forming a device isolation layer in a substrate to define active regions, forming a conductive layer on the active regions, forming first mask patterns intersecting the active regions on the conductive layer, etching the conductive layer using the first mask patterns as etch masks to form bit lines, growing second mask patterns from top surfaces of the first mask patterns, and performing a patterning process using the second mask patterns as etch masks to form contact holes exposing the active regions between the bit lines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.