Patent · US Active

Microelectromechanical displacement structure and method for controlling displacement

US10752492B2 · kind B2 · utility

0Cited by
79References
35Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 24, 2015
Grant dateAug 25, 2020
Priority date—
Expiry dateAug 3, 2035

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2203/051
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.