Method of forming a thin film
US10752645B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Jun 12, 2019 |
| Grant date | Aug 25, 2020 |
| Priority date | — |
| Expiry date | Jun 12, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45553
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A silicon-containing intermediate is synthesized by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene. A lanthanum compound is synthesized by reacting the silicon-containing intermediate with a dialkylamidine-based compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.