Method and optical system for reconstructing surface of object
US10753737B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2019 |
| Grant date | Aug 25, 2020 |
| Priority date | — |
| Expiry date | Nov 21, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for reconstructing a surface of an object includes the steps as follows. A light beam is modulated by a spatial light modulator (SLM) and is projected to form a pattern, wherein the pattern has a transmittance distribution in a cosine distribution such that the pattern is formed to become a fringe pattern with a periodic change. A first impulse and a second impulse present within a first period and a second period of the cosine distribution, wherein a position where the first impulse occurs within the first period and a position where the second impulse occurs within the second period are different. The light beam is guided to an object so as to form a scan pattern on the object. The scan pattern is read. According to the scan pattern, a surface profile of the object is calculated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.