Micromechanical yaw rate sensor and method for operating same

US10753742B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Reinhard Neul · Stuttgart, DE
• Torsten Ohms · Lambach, DE
• Robert Maul · Reutlingen, DE
• Mirko Hattass · Stuttgart, DE
• Christian Hoeppner · Munich, DE
• Odd-Axel Pruetz · Leverkusen, DE
• Benjamin Schmidt · Stuttgart, DE
• Rolf Scheben · Stuttgart, DE
• Friedjof Heuck · Stuttgart, DE

Key dates

• Filing date: Nov 9, 2016
• Grant date: Aug 25, 2020
• Expiry date: Aug 5, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5712
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rate-of-rotation sensor includes a first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive beam arranged along the first Coriolis element. The first drive beam is coupled via a first spring to the first Coriolis element. The micromechanical rate-of-rotation sensor further includes a first drive electrode carrier extending from the first drive beam in a direction opposite to the first Coriolis element. The first drive electrode carrier is configured to carry a multiplicity of first drive electrodes extending parallel to the first drive beam.