Patent · US Active

Micromechanical yaw rate sensor and method for the production thereof

US10753743B2 · kind B2 · utility

0Cited by

1References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Reinhard Neul · Stuttgart, DE
Torsten Ohms · Lambach, DE
Robert Maul · Reutlingen, DE
Mirko Hattass · Stuttgart, DE
Christian Hoeppner · Munich, DE
Odd-Axel Pruetz · Leverkusen, DE
Benjamin Schmidt · Stuttgart, DE
Rolf Scheben · Stuttgart, DE
Friedjof Heuck · Stuttgart, DE

Key dates

Filing date	Nov 10, 2016
Grant date	Aug 25, 2020
Priority date	—
Expiry date	May 26, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5712
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.