Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure
US10753816B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Jun 6, 2018 |
| Grant date | Aug 25, 2020 |
| Priority date | — |
| Expiry date | Feb 20, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A manner to determine pressure (e.g. inside a vacuum package, such as a MEMS die), without prior calibration, is provided using a model and a set of one or more gauges (e.g. Pirani, thermistor, thermocouple gauges) with distinct geometries. In order to calculate pressure from the electrical measurements performed on the gauges, there are several intermediate steps and an analytical model describes each of these steps. Besides the electrical measurements, other inputs are required, such as material properties and certain dimensions, which may not be known accurately. Several different gauge geometries are proposed which can be combined in order to determine the vacuum (pressure) level without knowing the values of these inputs beforehand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.