Bulk acoustic wave resonator device
US10756700B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Jun 30, 2017 |
| Grant date | Aug 25, 2020 |
| Priority date | — |
| Expiry date | Mar 14, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/54
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.