Patent · US Active

Method for protecting a MEMS unit against infrared investigations and MEMS unit

US10759657B2 · kind B2 · utility

0Cited by

12References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Michael Curcic · Stuttgart, DE
Oliver Willers · Korb, DE
Sven Zinober · Friolzheim, DE
Ulrich Kunz · Stuttgart, DE

Key dates

Filing date	Mar 26, 2018
Grant date	Sep 1, 2020
Priority date	—
Expiry date	Jun 6, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH04L2209/805
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method is provided for protecting a MEMS unit against infrared investigations, at least one layer being built into the structure of the MEMS unit or at least one layer being applied on a surface of the MEMS unit. The at least one layer absorbs, reflects or diffusely scatters more than 50%, in particular more than 90% of an infrared light incident upon it.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.