Sensor device employing MEMS
US10760910B2 · kind B2 · utility
7Cited by
0References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2018 |
| Grant date | Sep 1, 2020 |
| Priority date | — |
| Expiry date | Aug 5, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0242
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.