Particle detecting device and control method for the particle detecting device
US10761008B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 23, 2017 |
| Grant date | Sep 1, 2020 |
| Priority date | — |
| Expiry date | Jun 5, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle detecting device includes a chamber 30; a first introduction flow path 225 for introducing a particle-containing fluid into the chamber 30; a second introduction flow path 235 for introducing a particle-free fluid into the chamber 30; a light source 10 configured to illuminate fluid in the chamber 30 to detect particles contained in the fluid; a discharge flow path 260 for discharging fluid from the chamber 30; an introduction flow meter 245 configured to measure a flow rate of fluid flowing through the second introduction flow path 235; and a control unit 301 configured to perform control such that a fluid having a total flow rate obtained by adding a predetermined flow rate of fluid flowing through the first introduction flow path 225 to a flow rate of fluid flowing through the second introduction flow path 235, the flow rate being measured by the introduction flow meter 245, flows through the discharge flow path 260.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.