Patent · US Active

Multi-parallel sensor array system

US10761041B2 · kind B2 · utility

0Cited by
17References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 21, 2017
Grant dateSep 1, 2020
Priority date
Expiry dateJul 17, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67248
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present disclosure relates to a sensing system and method that includes a plurality of resistive elements coupled to a plurality of nodes and a control system configured to index through a plurality of modes to measure an electrical characteristic for each resistive element. Each mode of the plurality of modes represents a different combination of power, return, or open circuit condition applied to each of the plurality of nodes, and the control system is configured to calculate, for each of the modes, a total power consumed by the system and a power consumed by each of the resistive elements based on the measured electrical characteristics, to determine a physical parameter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.