Liquid crystal on silicon panel having less diffraction
US10761385B2 · kind B2 · utility
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Key dates
| Filing date | Dec 22, 2017 |
| Grant date | Sep 1, 2020 |
| Priority date | — |
| Expiry date | Dec 22, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13398
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A liquid crystal on silicon (LCOS) panel comprises: a silicon substrate having silicon circuit within the silicon substrate; a plurality of metal electrodes disposed on the silicon substrate, where the plurality of metal electrodes are periodically formed on the silicon substrate; a dielectric material disposed in and filling gaps between adjacent metal electrodes; and an oxide layer disposed on the plurality of metal electrodes and the dielectric material in the gaps between adjacent metal electrodes; where the refractive index of the dielectric material is higher than the refractive index of the oxide layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.