Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
US10763817B2 · kind B2 · utility
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Key dates
| Filing date | Oct 12, 2017 |
| Grant date | Sep 1, 2020 |
| Priority date | — |
| Expiry date | Oct 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02488
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of an open loop characterization of an electrostatic MEMS based resonator with a varying gap, the method including: converting, via a trans-impedance amplifier circuit, an output current signal of the resonator into a voltage; multiplying the output current signal converted into the voltage, by means of a multiplier circuit, with an AC signal or with a different signal at a frequency of the resonator and carrying a second harmonic signal to a main tone; and measuring a frequency response of a signal cleared of frequencies apart from the main tone using a network analyzer.
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