Work processing apparatus and method for manufacturing a processed work
US10766085B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2018 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Mar 23, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/14
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
To provide a work processing apparatus equipped with a vaporizer that requires no carrier gas and can vaporize a vaporization target liquid having a relatively high flow rate, and a method for manufacturing a processed work. A vaporizer 1 includes a vaporization part 10 including a heat storage body 11 having a heat capacity higher than that of a vaporization target liquid Fq by a predetermined ratio, and a heat supplier 20 for supplying heat to the vaporization part 10. The predetermined ratio is a ratio of heat capacity at which a temperature drop of the heat storage body 11 by heat transfer from the heat storage body 11 to the liquid Fq flowing through a path 12 is within a predetermined range, wherein the amount of heat transferred from the heat storage body 11 to the liquid Fq is an amount of heat necessary to vaporize the liquid Fq at a planned proportion. A work processing apparatus 100 includes the vaporizer 1, a chamber 5, and a vacuum pump 6 for creating a negative pressure in the chamber 5. The method of manufacturing a processed work includes taking the work W into the chamber 5, supplying a processing gas Fg generated in the vaporizer 1 into the chamber 5, and performi…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.