Method of manufacturing carbon nanotube composite and laminate
US10766227B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2018 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Nov 13, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12535
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of manufacturing a carbon nanotube composite includes: a laminate forming step of forming, on a conductive base material made of a first metal having conductivity, a buffer layer made of a second metal capable of mutual diffusion with the first metal, and forming, on the buffer layer, a catalyst layer made of seed catalyst particles which catalyze formation of carbon nanotubes; a buffer layer diffusion step of performing heat treatment on the laminate; and a carbon nanotube layer forming step of forming the carbon nanotubes on the catalyst layer of the laminate by a chemical vapor deposition method, wherein the heat treatment is performed so as to form a solid phase diffusion region where the first metal and the second metal are solid-phase diffused from a surface of the conductive base material to a predetermined depth selected from depths of 850 nm or more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.