Patent · US Active

MEMS sensor compensation for off-axis movement

US10766764B2 · kind B2 · utility

0Cited by

1References

7Claims

0Family size

Assignee

InvenSense, Inc. · US

Inventors

Ilya Gurin · Mountain View, US
Joseph Seeger · Menlo Park, US
Matthew Julian Thompson · Beaverton, US

Key dates

Filing date	Aug 12, 2019
Grant date	Sep 8, 2020
Priority date	—
Expiry date	Aug 12, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0808
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectromechanical system (MEMS) sensor includes a MEMS layer that includes fixed and movable electrodes. In response to an in-plane linear acceleration, the movable electrodes move with respect to the fixed electrodes, and acceleration is determined based on the resulting change in capacitance. A plurality of auxiliary electrodes are located on a substrate of the MEMS sensor and below the MEMS layer, such that a capacitance between the MEMS layer and the auxiliary loads changes in response to an out-of-plane movement of the MEMS layer or a portion thereof. The MEMS sensor compensates for the acceleration value based on the capacitance sensed by the auxiliary electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.