Switch arrangements for microelectromechanical systems
US10770253B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2018 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Mar 15, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0063
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Microelectromechanical system (MEMS) switches that provide low contact resistance over a large number of open and close contact cycles are disclosed. A MEMS switch device may include a plurality of parallel MEMS switches with a first MEMS switch that is configured differently in such a manner to close first and/or open last during open and close cycles. In this regard, the first MEMS switch may experience increased contact resistance over a large number of open and close cycles while other MEMS switches maintain a low contact resistance. In certain embodiments, the first MEMS switch is controlled by a different control signal to open and close differently than the other MEMS switches. In certain embodiments, a common control signal controls a plurality of MEMS switches and the first MEMS switch is mechanically different such that it opens and closes differently than other MEMS switches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.