Patent · US Active

Positioning device, loading and/or unloading system and method for operating a positioning device

US10770326B2 · kind B2 · utility

0Cited by

0References

8Claims

0Family size

Assignee

VAT Holding AG · CH

Inventors

Florian Ehrne · Feldkirch, AT
Martin Netzer · Bludenz, AT
Andreas Hofer · Dormagen, DE
Marco Apolloni · Marbach, CH

Key dates

Filing date	Apr 8, 2019
Grant date	Sep 8, 2020
Priority date	—
Expiry date	Apr 8, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67781
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container.The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.