Capacitive RF MEMS intended for high-power applications
US10770640B2 · kind B2 · utility
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3References
10Claims
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Assignee
Inventors
Key dates
| Filing date | Dec 23, 2015 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Jul 8, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2057/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.