Method for manufacturing air pulse generating element
US10771891B2 · kind B2 · utility
0Cited by
1References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2019 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Apr 10, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2217/03
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing an air pulse generating element is provided. First, a thin film layer including a membrane is provided, and then, a plurality of actuators are formed on the thin film layer. After that, a first chamber is formed between the thin film layer and a first plate and followed by patterning the thin film layer to form a plurality of valves, in which the membrane and the valves are formed of the thin film layer. Subsequently, a second chamber is formed between the thin film layer and a second plate, and a plurality of channels are formed in the first plate and the second plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.