Roll type imprint master mold, method of manufacturing the same, and imprint method using the same
US10773427B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2017 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | May 6, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29K2845/00
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method of manufacturing a roll type imprint master mold including disposing a base layer on a substrate including a first area and a second area adjacent to the first area, disposing an inorganic insulation layer on the base layer, forming a first mask pattern and a first resin pattern in the first area, forming a pattern layer by etching the inorganic insulation layer using the first resin and the first mask patterns as a mask, removing the first resin and the first mask patterns, forming a second mask pattern and a second resin pattern in the second area, forming a pattern layer by etching the inorganic insulation layer using the second resin and the second mask patterns as a mask, removing the second resin and the second mask patterns, separating the base layer from the substrate, and attaching the base layer onto a roll body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.