Determining a position of a movable part of a coordinate measuring machine

US10775148B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Udo Gruber · Neusäß, DE
• Gunter Grupp · Böhmenkirch, DE
• Ralf Bernhardt · Aalen, DE

Key dates

• Filing date: Oct 11, 2017
• Grant date: Sep 15, 2020
• Expiry date: Mar 29, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A coordinate measuring machine comprising a movable part, a drive and drive controller, and a position measuring system for measuring position values of the movable part. Intended values produced by the drive controller are supplied to a computational model (MOD) of a computational device. The intended values respectively predetermine an intended state of the drive. Position deviations (Δs) are formed between the measured position values (s) and position estimates of the computational model (MOD). The position estimates are produced by the computational model (MOD) for a predetermined location at the movable part. Acceleration values are measured by an acceleration sensor arranged at a location at the movable part. Acceleration deviations (Δa) are formed between the measured acceleration values (a) and acceleration estimates of the computational model (MOD). During the operation of the coordinate measuring machine, the position deviations (Δs) and the acceleration deviations (Δa) are supplied to the computational model (MOD), which outputs updated position estimates (ŝ) and updated acceleration estimates (â), accordingly. The position of the movable part is determined by the update…