Sensor device, gyro sensor, and electronic apparatus
US10775168B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2015 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | May 2, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/302
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a sensor device that includes a vibrator unit, an annular base portion, a plurality of coupling portions, and a wiring layer. The wiring layer includes a plurality of drive wirings and a plurality of detection wirings. The plurality of drive wirings are respectively connected to first and second drive electrodes while being adjacent and parallel to one another. The plurality of detection wirings are respectively connected to first and second detection electrodes while being adjacent and parallel to one another. The wiring layer is provided at each of the plurality of coupling portions to electrically connect a plurality of terminal portions provided in the base portion with a plurality of piezoelectric drive units and first and second piezoelectric detection units provided in the vibrator unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.