Patent · US Active

Method for manufacturing a MEMS element

US10775170B2 · kind B2 · utility

0Cited by

5References

28Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Joerg Braeuer · Nehren, DE
Christian Hoeppner · Munich, DE
Lars Tebje · Reutlingen, DE

Key dates

Filing date	Aug 31, 2016
Grant date	Sep 15, 2020
Priority date	—
Expiry date	Aug 31, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/025
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.