Accelerometers
US10775404B2 · kind B2 · utility
0Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2015 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Jul 17, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for closed loop operation of a capacitive accelerometer uses a single current source (62) and a single current sink (64) to apply an in-phase drive signal V1′ to a first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal V2′ to a second set of fixed capacitive electrode fingers. This provides a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintains the proof mass at a null position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.