Probe card and contact inspection device
US10775411B2 · kind B2 · utility
3Cited by
0References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2016 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Jun 1, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card includes a probe having a spring property and a probe head that holds the probe. The probe head includes a guide portion that holds the probe such that the probe can move in an axis direction Z. The guide portion includes a heat radiation structure that absorbs heat of the probe generated by energization and emits the heat to the outside of the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.