Patent · US Active

Image sensor testing probe card

US10775413B2 · kind B2 · utility

1Cited by
6References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 5, 2016
Grant dateSep 15, 2020
Priority date
Expiry dateMay 4, 2038

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49165
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method of increasing uniformity in light from a light source at a plurality of targets of the light includes locating a plurality of movable aperture elements between the light source and the targets. Each aperture element defines an aperture through which the light passes from the light source to an associated one of the plurality of targets associated with the aperture element along a longitudinal axis of the aperture element. The method also includes moving at least one of the aperture elements along its longitudinal axis to change a feature of light incident on the target associated with the aperture element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.