Embedding mirror with metal particle coating
US10775573B1 · kind B1 · utility
27Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2019 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Apr 3, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for forming an embedded mirror structure is disclosed. The method includes preparing a structure that has a substrate and a waveguide layer on the substrate. The waveguide layer includes a core. Also, the waveguide has a top surface and a cavity side surface that defines a cavity opened at the top surface and aligned to the core. The method further includes coating metal particles on the cavity side surface inside the cavity of the waveguide layer to form a metal particle film on the cavity side surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.