Micromechanical actuator device and method for tilting a micromechanical actuator device
US10775610B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2016 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Nov 16, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0018
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An actuator device and a method for tilting an actuator device. The method includes the steps: conducting electrical current through an electrical conduction device, which is guided via a tilting device of the actuator device, within a first magnetic field that is generated by a permanent magnet device of the actuator device, so that an actuator element of the tilting device is tilted along a first tilting axis as the result of a Lorentz force; and generating a second magnetic field by an electromagnet device of the actuator device in the area of the permanent magnet device, so that the tilting device is tilted along a second tilting axis as the result of magnetic attraction and repulsion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.