Patent · US Active

Micromechanical actuator device and method for tilting a micromechanical actuator device

US10775610B2 · kind B2 · utility

0Cited by
1References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 18, 2016
Grant dateSep 15, 2020
Priority date
Expiry dateNov 16, 2036

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B3/0018
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An actuator device and a method for tilting an actuator device. The method includes the steps: conducting electrical current through an electrical conduction device, which is guided via a tilting device of the actuator device, within a first magnetic field that is generated by a permanent magnet device of the actuator device, so that an actuator element of the tilting device is tilted along a first tilting axis as the result of a Lorentz force; and generating a second magnetic field by an electromagnet device of the actuator device in the area of the permanent magnet device, so that the tilting device is tilted along a second tilting axis as the result of magnetic attraction and repulsion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.