Mounting member
US10777446B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2017 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Jul 3, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is a mounting member that is excellent in low dusting property and hardly contaminates an object to be mounted while being excellent in gripping force and heat resistance. The mounting member of the present invention includes an aggregate of carbon nanotubes for forming a mounting surface, wherein when the mounting member is placed on a silicon wafer so that a carbon nanotube aggregate-side surface thereof is brought into contact with the silicon wafer, and the resultant is left to stand for 30 seconds while a load of 100 g is applied from above the mounting member, a number of particles each having a diameter of 0.2 μm or more transferred onto the silicon wafer is 100 particles/cm2 or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.