Patent · US Active

Generating plasma or laser pulses by radiofrequency excitation pulses

US10777961B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

TRUMPF LASER- UND SYSTEMTECHNIK GMBH · DE

Inventors

Robert Schulz · Wien, AT
Torsten Beck · Stuttgart, DE

Key dates

Filing date	Apr 11, 2018
Grant date	Sep 15, 2020
Priority date	—
Expiry date	Apr 11, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH05H2242/20
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Methods, devices, and apparatus for generating plasma or laser pulses by radio frequency (RF) excitation pulses are provided. In one aspect, a method includes specifying radio frequency (RF) excitation pulses at least partially as a function of a preceding RF excitation of a medium and outputting a signal to a RF pulse generator, the signal configured to cause the RF pulse generator to generate the specified RF excitation pulses for exciting the medium to generate plasma or laser pulses. The RF excitation pulses is specified to become more strongly reduced in energy when a remaining excitation of the medium by the preceding RF excitation is higher.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.