Patent · US Active

Surface acoustic wave filter and multiplexer

US10778187B2 · kind B2 · utility

5Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 2019
Grant dateSep 15, 2020
Priority date
Expiry dateApr 17, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H9/6483
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A filter includes a LiTaO3 piezoelectric layer having a cut angle, a high acoustic velocity support substrate, a low acoustic velocity film, and an IDT electrode. A cut angle θB of the piezoelectric layer at which a Rayleigh wave spurious response is locally reduced or minimized is determined from a wavelength of the IDT electrode, a film thickness of the IDT electrode, a specific gravity of the IDT electrode, an electrode duty, a thickness of the piezoelectric layer, and a film thickness of the low acoustic velocity film. The Cut angle of the piezoelectric layer satisfies a relationship of θB−4≤θ≤θB+4.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.