Coating source for producing doped carbon layers
US10781102B2 · kind B2 · utility
0Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2016 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Aug 2, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/61
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A coating source for physical vapor deposition to produce doped carbon layers. The coating source is produced by way of sintering from pulverulent components and is formed of carbon as matrix material in a proportion of at least 75 mol % and at least one dopant in a proportion in the range from 1 mol % to 25 mol %.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.