Quadrature ADC feedback compensation for capacitive-based MEMS gyroscope
US10782131B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2018 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Feb 13, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03G3/20
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A quadrature ADC feedback compensation system and method for MEMS gyroscope is disclosed. In an embodiment, a MEMS gyroscope comprises an analog processing chain including a drive circuit for generating an analog drive signal and a sense circuit that is configured to generate an analog rate signal and an analog quadrature signal in response to a change in capacitance output by the MEMS gyroscope. A compensation circuit coupled to the sense circuit is configured to null the analog quadrature signal using the analog drive signal and a compensation value, and to adaptively compensate, in a digital processing chain, a quadrature-induced rate offset of a digital rate signal over temperature using a digital quadrature signal, the compensation value and temperature data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.