Gathering and sampling device and inspection apparatus
US10782211B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 29, 2017 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Apr 27, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/028
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sampling device and an inspection apparatus are disclosed. In one aspect, an example gathering and sampling device includes a cylindrical outer housing and an inner housing disposed within the cylindrical outer housing, a cyclone chamber is formed between the cylindrical outer housing and the inner housing to generate a cyclone by injecting a gas flow into the cyclone chamber. The gathering and sampling device further includes an outer chamber body, and a plurality of gas injection orifices formed in the first inner housing end opening of the inner housing and configured to inject a gas towards a substantial center of a circular region defined by an end face of the first outer housing end opening of the cylindrical outer housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.