Optical sensing with critically coupled planar waveguide with optional integration of layered two-dimensional materials

US10782233B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Feng Wang · Export, US
• Jason Horng · Berkeley, US
• Halleh Balch · Oakland, US

Key dates

• Filing date: Mar 13, 2017
• Grant date: Sep 22, 2020
• Expiry date: Jun 16, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R29/0885
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical sensing system includes a planar optical waveguide having a first surface for detection and a second surface for coupling light. The optical sensing system includes a functional layer integral with the first surface of the planar optical waveguide, and a coupling layer in contact with the second surface of the planar optical waveguide, the coupling layer having a lower refractive index than the planar optical waveguide. The optical sensing system includes an optical source arranged to illuminate at least a portion of the second surface of the planar optical waveguide through the coupling layer with substantially critical optical coupling. The optical sensing system also includes an optical detector arranged to receive a portion of light from the optical source after being reflected from the first surface of the planar optical waveguide and passing through the coupling layer.