Patent · US Active

Semiconductor device

US10784260B2 · kind B2 · utility

6Cited by
10References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 2018
Grant dateSep 22, 2020
Priority date
Expiry dateOct 11, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/834
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A semiconductor device includes first, second, and third transistors on a substrate and having different threshold voltages from each other, each of the first, second, and third transistors including: a gate insulating layer, a first work function metal layer, and a second work function metal layer. The first work function metal layer of the first transistor may include a first sub-work function layer, the first work function metal layer of the second transistor may include a second sub-work function layer, the first work function metal layer of the third transistor may include a third sub-work function layer, and the first, second, and third sub-work function layers may have different work functions from each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.